MEMS Curriculum
BIM 118 MEMS-NEMS (Winter, Dr. T. Pan)
Fundamentals of Microfabrication and Microsystem Design
BIM 213 Biosensors (Fall, Dr. A. Revzin)
Design of Chemical Sensing Systems for Biological Applications
BIM 218 Micro-Nano Sciences (Fall, Dr. T. Pan)
Understanding of Physical and Chemical Principles at µ-n Scale
EAD 289E Micro-Nano Fabrication (Spring, Dr. F. Yaghmaie)
Advanced Microfabrication Course Offered by NC2
EEC 146A Integrated Circuits Fabrication (Fall, Dr. S. Islam)
Basic Fabrication Processes for MOS Integrated Circuits
MAE 229 Design and Analysis of MEMS (Spring, Dr. D. Horsley)
Advanced MEMS Design Course with a Mechanical Focus
MAE 298 Introduction to BioMEMS (Fall, Dr. C. Davis)
Advanced MEMS Design Course with a Biomedical Focus
MAE 298 Micro- and Nano-Flow (Spring, Dr. J. P. Delplanque and Dr. W. Kollmann)
Advanced MEMS Design Course with a Biomedical Focus
International Collaboration Program in Micro-Nano-Bioengineering
Center of Microelectromechanical Systems at Peking University
Certified Training Program in Micro-Nano-Bioengineering
Jointly offered with NC2 (coming soon)